quote: SiO2 buffer layer, really? Think thru what you said. Today we can't support a thinner electrical thickness and control leakage. Now you tell me you need a layer of Oxide then add some thicker HiK and get a thinner electrical oxide then a nitrided oxide... Sorry is that HiK have negative effecitive oxide thickness? If you add a buffer of oxide then you negate all the benifits of having HiK helping your eletrical TOX.